| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor capable of contributing to thinning, while restraining sensitivity from getting worse, and a manufacturing method therefor. <P>SOLUTION: This semiconductor acceleration sensor manufactured using a semiconductor substrate is provided with an outer frame formed of the semiconductor substrate, a plurality of beam parts formed of the semiconductor substrate, and connected to the outer frame, the first weight part formed of the semiconductor substrate, and connected to the beam part, and the second weight part connected to an end face in a side opposite to the beam part of the first weight part. The second weight part is formed of a material having a specific gravity higher than that of the first weight part. <P>COPYRIGHT: (C)2008,JPO&INPIT |
