| 摘要 |
PROBLEM TO BE SOLVED: To prevent contamination in dispensation by performing a wash of a dispensing nozzle by using a detergent without lowering treatment speed. SOLUTION: This nozzle washer is equipped with a wash tank 61 disposed on a movement route of a dispensing nozzle 301. A detergent supply part 63 for supplying a detergent liquid to within the wash tank 61 and a water supply part 65 for supplying wash water to within the wash tank 61 are disposed on a side wall of the wash tank 61. Further, a discharge port 67 for discharging waste liquid is formed in a bottom surface of the wash tank 61 below the supply part 65. First, the dispensing nozzle 301 is moved to a detergent washing position adjacent to the supply part 63 and detergent-washed by using the detergent liquid supplied from the supply part 63. Then, the dispensing nozzle 301 is moved to a water wash position adjacent to the supply part 65 by a turning motion of an arm 303 and water-washed by using the wash water supplied from the supply part 65. COPYRIGHT: (C)2008,JPO&INPIT |
