| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that can accurately project a mask pattern on a workpiece and has excellent machining accuracy. <P>SOLUTION: The laser beam machining apparatus incorporates a television camera 351 for observing an alignment mark formed on the surface of a workpiece 320, and provided with an auto-focusing unit 340 that can measure the focal length of a projection lens 310, wherein an elongation/contraction quantity Ex for a designed value in the main scanning direction and an elongation/contraction quantity Ey for a designed value in the sub scanning direction are obtained for the workpiece 320, and the moving speed of a mask 330 and/or the workpiece 320 is compensated by compensating the imaging magnification M of the projection lens 310 with respect to the elongation/contraction quantity Ex, and by taking into consideration of the imaging magnification M of the projection lens with respect to the elongation/contraction quantity Ey. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
