| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous type kiln capable of cooling processing in a short time, without causing partial warping and deformation in a processing object, by efficiently cooling the whole surface of the processing object such as a glass substrate. SOLUTION: An introducing duct 1 and an exhaust duct 2 are arranged in a cooling chamber 15 of the continuous type kiln. The introducing duct and the exhaust duct are opened over the substantially whole area in the kiln width direction Y on an upper side inner wall surface of the cooling chamber. The introducing duct blows off air toward the upstream side in the carrying direction. The exhaust duct exhausts air in the cooling chamber on the upstream side of the introducing duct in the carrying direction. A flow passage of cooled outside air is uniformly formed over the substantially whole area in the kiln width direction Y above the processing object 100 carried on a roller 16. The processing object uniformly contacts with the air over the whole upper surface. COPYRIGHT: (C)2008,JPO&INPIT
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