| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressing device capable of suppressing manufacturing defects in a laminating substrate. SOLUTION: The pressing device holds two first and second substrates in a processing chamber, and sticks the first and second substrates by reducing pressure in the chamber. The chamber includes a first and second holding plate provided thereinside for holding the first and second substrate, respectively, wherein the first holding plate is connected to a first moving mechanism for making the first holding plate move in a vertical direction, the first moving mechanism being provided in the outside of the processing chamber through a plurality of first columns that penetrates the processing chamber; and the second holding plate is connected to a second moving mechanism for making the second holding plate move relatively in a parallel direction, the second moving mechanism being provided in the outside of the processing chamber through a plurality of second columns that penetrates the processing chamber. COPYRIGHT: (C)2008,JPO&INPIT
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