| 摘要 |
PROBLEM TO BE SOLVED: To realize a manufacturing technique for efficiently manufacturing a MEMS (Micro Electro Mechanical System) structure. SOLUTION: This MEMS structure is provided with processes of: forming an insulating film 11 on a substrate 10; forming MEMS function structure parts 12, 14, 15A, 15B, 16A and 16B on the insulating film 11; forming a sidewall 18S on a side surface at an edge part of each of the MEMS function structure parts and removing the insulating film 11 by leaving parts coated with the MEMS function structure parts and the sidewall; and removing the sidewall 18S. COPYRIGHT: (C)2008,JPO&INPIT
|
