发明名称 |
METHOD FOR DETECTING TIP POSITION OF PROBE, ALIGNMENT METHOD, APPARATUS FOR DETECTING TIP POSITION OF PROBE AND PROBE APPARATUS |
摘要 |
An probe tip position detecting method detects tip positions of a plurality of probes by using a tip position detecting device including a sensor unit for detecting tips of the probes and a movable contact body belonging to the sensor unit, the method used in inspecting electrical characteristics of an object to be inspected by bringing the object supported on a movable mounting table into electrical contact with the probes. The method includes a first step for moving the tip position detecting device by using the mounting table to thereby bring the contact the object into contact with the tips of the probes; a second step for further moving the mounting table to thereby move the contact body toward the sensor unit without causing elastic deformation to the probes; and a third step of determining a movement starting position of the contact body as the tip positions of the probes.
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申请公布号 |
US2008231300(A1) |
申请公布日期 |
2008.09.25 |
申请号 |
US20080046879 |
申请日期 |
2008.03.12 |
申请人 |
TOKYO ELECTRON LIMTED |
发明人 |
YAMADA HIROSHI;SUZUKI MASARU |
分类号 |
G01R1/067 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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