| 摘要 |
<p>The present invention relates to an apparatus (100) for patterning a workpiece arranged at an image plane (150) and sensitive to electromagnetic radiation, comprising a source (142) emitting electromagnetic radiation onto an object plane (160) and at least two spatial light modulators each comprising numerous of object pixels, adapted to receive the electromagnetic radiation at the object plane and to relay the electromagnetic radiation toward the workpiece, wherein the electromagnetic radiation is split into at least two beams, which beams will impinge on different spatial light modulators, by a beam splitting device arranged at an optical plane between the spatial light modulators and an illuminator pupil or a conjugate optical plane. The invention also relates to a method for patterning a workpiece with a plurality of spatial light modulators.</p> |
