INERTIAL SENSOR, ITS MANUFACTURING METHOD, AND ELECTRIC AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an inertial sensor having high power and a wide dynamic range without causing malfunctioning or degrading the responsiveness.

SOLUTION: The inertial sensor comprises: a plurality of inertial sensor elements 11 that have elastic support bodies 102-1 to 102-4 one ends of which are supported by support parts 103-1 to 103-4 and vibrators 101-1 and 101-2 which are supported by the other ends of the above elastic support bodies 102-1 to 102-4, wherein, an output value detected in each of the above inertial sensor elements 11 is outputted after an addition operation.

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