| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a good processed surface by suppressing the influence of vibration and so-called thermal lensing of a laser machining apparatus. <P>SOLUTION: A laser machining apparatus 30 includes a laser oscillator 302, a regulator 304, a uniformity apparatus 306, a measuring instrument 310, a beam wedge 308, and a controller 312. The measuring instrument 310 measures the intensity of laser light. The controller 312 calculates a plurality of kinds of value related with the laser light intensity in a plurality of portions of a region which has received the irradiation of a laser beam, judges individually whether the plurality of kinds of the value satisfies requirements, and generates a first control signal and a second control signal of the content corresponding to whether which of the value has satisfied the requirements among the value of the plurality of kinds. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
