发明名称 |
FOIL TRAP AND EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE USING THE FOIL TRAP |
摘要 |
An extreme ultraviolet (EUV) light source device and foil trap, the device including a vessel; an EUV radiating species supply means that feeds an extreme ultraviolet radiating species into the vessel; a discharge part with discharge electrodes that heat and excite the EUV radiating species and generate a high-temperature plasma; a collector mirror collecting EUV radiation emitted from the plasma; the foil trap installed between the discharge part and the mirror; an extractor part extracting the collected radiation; and an evacuation means exhausting and regulating pressure within the vessel. The foil trap includes foils extending radially from a main axis thereof to capture debris from the light source, while allowing the emitted radiation to pass through a region thereof to the mirror. A length of at least part of the foils in directions parallel to the main axis is shorter in positions close to the main axis than distant therefrom.
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申请公布号 |
US2008230726(A1) |
申请公布日期 |
2008.09.25 |
申请号 |
US20080038970 |
申请日期 |
2008.02.28 |
申请人 |
USHIODENKI KABUSHIKI KAISHA |
发明人 |
SHIRAI TAKAHIRO;INOUE TAKAHIRO |
分类号 |
G01J3/10 |
主分类号 |
G01J3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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