| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic pressure sensor capable of performing pressure measurement with high reliability. SOLUTION: A contact layer 14a is formed on a protruding part 11b of a cavity 18 so as to be connected electrically to a GMR element 13. An electrode pad 15 is formed on a protruding part 11a outside a cavity 18. A contact layer 14b is formed on a protruding part 12a in a glass substrate 12 inside the cavity 18 so as to be connected electrically to the GMR element 13. The electrode pad 15 is formed on the glass substrate 12 outside the cavity 18. A contact layer 14c is formed from the protruding part 12a to the electrode pad 15 via the outside of the protruding part 12a. A silicon substrate 16 is bonded to the protruding part 12a of the glass substrate 12 so that the cavity 18 is formed in a space to the glass substrate 12. COPYRIGHT: (C)2008,JPO&INPIT
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