摘要 |
PROBLEM TO BE SOLVED: To provide a transparent conductive membrane constituted of an oxide membrane and a metal membrane which is high in transmissivity of a visible range, superior in conductivity and cutoff characteristics of a near-infrared region, and superior in humidity resistance and chemical resistance. SOLUTION: The transparent conductive membrane is constituted of an amorphous oxide membrane (a-GIO membrane) mainly constituted of gallium, indium, and oxygen, and the metal membrane (Me membrane) composed of silver or an alloy having silver as the main component, and has a three-layered structure pinching the metal membrane by the amorphous oxide membrane. Then, a multi-layered membrane including this transparent conductive membrane is installed on a transparent substrate, and a transparent conductive substrate, a transparent conductive film, and a near-infrared cutoff filter are fabricated. COPYRIGHT: (C)2008,JPO&INPIT
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