| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment system in which the deformation of a shower plate hardly occurs. SOLUTION: The vacuum treatment system 10 is arranged with an insulation frame 21a having thermal insulating properties in place of metal and the shower plate 22a is held from an upper electrode 20a by the insulation frame 21a. In a film deposition treatment, the heat flowing into the shower plate 22a from a treatment object 35 is not transferred from a peripheral part of the shower plate 22a to the upper electrode 20a. Therefore, the temperature does not fall in the peripheral part of the shower plate 22a and the intra-surface temperature distribution of the shower plate 22a is uniformly maintained and an internal stress is hardly generated and the deformation of the shower plate 22a is substantially obviated. COPYRIGHT: (C)2008,JPO&INPIT
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