| 摘要 |
<p>A stage apparatus is provided to process a work quickly by running plate input and output units and work input and output units alternately. A stage apparatus comprises a stage base, a plate input and output unit, a work input and output unit, a plurality of thrust generating units(21-1~21-4,22-1~22-5), a plate(6), plate position detecting units(11,12), and a control unit(13). The plate input and output unit is configured on the stage base to input and output the plate supporting works. The work input and output unit is configured to input unprocessed works and output processed works. The thrust generating units are fixed to the stage base, and have magnetic poles generating movable magnetic field by injecting air. The plate has a platen of a plane shape and is driven by the thrust generating unit, wherein the platen has a convex pole in a check shape and faces the thrust generating unit. The plate position detecting units are configured to detect position of the plate on the stage base. The control unit selects one of the thrust generating units on the basis of a plate position signal output by the plate position detecting unit.</p> |
