APPARATUS AND METHOD FOR WHITE POWDER REDUCTION IN SILICON NITRIDE DEPOSITION USING REMOTE PLASMA SOURCE CLEANING TECHNOLOGY,申请号KR20050076333-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR WHITE POWDER REDUCTION IN SILICON NITRIDE DEPOSITION USING REMOTE PLASMA SOURCE CLEANING TECHNOLOGY
摘要
申请公布号	KR100857871(B1)	申请公布日期	2008.09.10
申请号	KR20050076333	申请日期	2005.08.19
申请人		发明人
分类号	B08B7/00;C23C16/50;C23C16/34;C23C16/42;C23C16/44;C23C16/52;H01L21/205;H01L21/3065;H01L21/31	主分类号	B08B7/00
代理机构		代理人
主权项
地址

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