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发明名称
ANTI-REFLECTIVE COATINGS
摘要
Novel self-crosslinking polymers are provided and which are useful in antireflective coatings to reduce outgassing.
申请公布号
EP1966255(A1)
申请公布日期
2008.09.10
申请号
EP20060809163
申请日期
2006.10.26
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
ABDALLAH, DAVID, J.;YIN, JIAN;NEISSER, MARK, O.
分类号
C08F8/30;G03F7/09;H01L21/027
主分类号
C08F8/30
代理机构
代理人
主权项
地址
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