| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain an optical path conversion element having small loss and high reliability and a manufacturing method having high productivity, in a multichannel optical path conversion element that converts a plurality of optical paths by means of mirrors. <P>SOLUTION: The manufacturing method of the multichannel optical path conversion element which converts a plurality of optical paths by means of mirrors is characterized in that: (1) a core material is filled in a plurality of arrayed holes prepared on a substrate to form a vertical waveguide; (2) after filling the core material in a groove crossing the holes on the substrate face to form a core, a clad layer is formed thereon to form a horizontal waveguide; (3) with a groove prepared having a slope of 45°at the intersection between the vertical and horizontal waveguides, a metallic film or a dielectric film is formed on the slope to form a mirror; (4) an electrode is formed on a glass substrate on the opposite side from the mirror; and (5) dicing in chips is performed. Also, the invention includes a multichannel optical path conversion element manufactured by this method. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
