| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a leak detector capable of inspecting leak by a plurality of carrier gases containing helium with high working efficiency. <P>SOLUTION: A standard leak 6 for calibration filled with mixed gas of helium gas and hydrogen gas is mounted, and calibration operation is performed, thereby acquiring detection sensitivities of the helium gas and hydrogen gas at a time. Each acquired detection sensitivity is stored in a storage section 72. When an operation section 71 indicates with which carrier gas the leak is inspected, the acceleration voltage of an analysis pipe 5 is set so that the indicated carrier gas can be detected, and the amount of leak is calculated using the detection sensitivity of the indicated carrier gas. As a result, when the leak inspection of different carrier gas is performed by switch, the leak inspection working hours can be shortened. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
