| 摘要 |
PROBLEM TO BE SOLVED: To provide a drainage system, along with a cleaning device using the same, for quick drainage and control thereof. SOLUTION: A bucket storing a quartz wafer W is submerged in a cleaning bath 1 in which a pure water L is held, and then, the bucket B is applied with a specified rocking action by a rocking device. Then, a cock 51 is opened to supply a compressed air to a communication pipe, which is supplied to a blown-out opening 21. So the pressure at the blow-out opening is instantaneously raised to push up a valve 4. Under this operation, a flange part 41 rises to open a discharge opening, and the pure water (liquid) in the cleaning bath 1 is discharged through the discharge opening. The compressed air that has pushed up a top plate is guided downward along the side wall of the valve from the inside of the top plate. It is eventually discharged forcedly through the discharge opening 22. Thus, a quick drainage is performed. COPYRIGHT: (C)2008,JPO&INPIT
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