发明名称 |
LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD USING THE SAME |
摘要 |
Provided is a laser processing apparatus wherein an XY table is constituted with a plurality of vertically movable divided blocks. The table is stopped with at least one divided block brought down, a laser beam is applied to an object to be processed in a region that corresponds to an upper part of the divided block, and a through hole is formed. |
申请公布号 |
WO2008084642(A1) |
申请公布日期 |
2008.07.17 |
申请号 |
WO2007JP74498 |
申请日期 |
2007.12.20 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;NAKAGAWA, YOSHINORI;HARA, MITSUO |
发明人 |
NAKAGAWA, YOSHINORI;HARA, MITSUO |
分类号 |
B23K26/10;B23K26/08;B23K26/16;B23K26/38;B23K26/42;B23K101/42 |
主分类号 |
B23K26/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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