发明名称 Observation apparatus provided with immersion objective lens
摘要 An observation apparatus for observing an observation object (12) mounted at an observation position on a stage (1) through an immersion objective lens (2) placed below the observation object (12). The observation apparatus has a liquid pouring device (8), constructed to be relatively movable with respect to the immersion objective lens (2), pouring a liquid on a top lens surface (2a) of the immersion objective lens (2) from the upper side of the immersion objective lens (2) at a distance from the observation position on the stage (1); and a position control device automatically adjusting relative positions of a liquid pouring position of the liquid pouring device (8) and the immersion objective lens (2) and automatically adjusting relative positions of the immersion objective lens (2) on which the liquid is poured by the liquid pouring device (8) and a desired observation position on the stage (1).
申请公布号 EP1944643(A1) 申请公布日期 2008.07.16
申请号 EP20070024112 申请日期 2007.12.12
申请人 OLYMPUS CORPORATION 发明人 HARADA, MITSUO;SHIMADA, YOSHIHIRO
分类号 G02B21/24;G02B21/33 主分类号 G02B21/24
代理机构 代理人
主权项
地址