| 摘要 |
An evaporation apparatus which can measure usage of an organic matter is provided, and a method of forming an organic layer, which can grasp the consumption of an organic matter, is provided. In an evaporation apparatus for evaporating an organic matter through a stabilization step, a deposition step, and a cooling step, the evaporation apparatus comprises: an evaporation source(40) which evaporates the organic matter, and comprises a heat source; a substrate fixing part for fixing a substrate; a sensor(50) for sensing the evaporation intensity of the organic matter; a control part(60) for calculating a deposition thickness of the organic matter through the stabilization step, the deposition step, and the cooling step using the evaporation intensity sensed by the sensor; and a consumption calculating part(70) for calculating the consumption of the organic matter by using a conversion factor between the deposition thickness of the organic matter and usage of the organic matter and the deposition thickness calculated by the control part.
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