发明名称 FABRICATION METHOD OF IMAGE SENSING DEVICE
摘要 An image sensing device includes a substrate with a photo sensing and a transistor regions, a photo diode, a transistor, a dielectric layer, a metal interconnect, a metal conductive line, a conformal passivation layer, a color filter, a lens planar layer, and a microlens. The photo diode is in the substrate within the photo sensing region. The transistor is on the substrate in the transistor region. The dielectric layer is on the substrate. Except the photo sensing region, the metal interconnect and the metal conductive line are respectively located in and on the dielectric layer. The conformal passivation layer is on the dielectric layer and covers the metal conductive line. The color filter is on the conformal passivation layer in the photo sensing region and the bottom thereof is lower than the top of the metal conductive line. The lens planar layer and the microlens are sequentially on precedent structure.
申请公布号 US2008096303(A1) 申请公布日期 2008.04.24
申请号 US20070963852 申请日期 2007.12.24
申请人 UNITED MICROELECTRONICS CORP. 发明人 WANG MING-I
分类号 H01L31/18 主分类号 H01L31/18
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