DEVICES, SYSTEMS, AND METHODS FOR CARBONATION OF DEIONIZED WATER
摘要
Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.
申请公布号
WO2008049001(A2)
申请公布日期
2008.04.24
申请号
WO2007US81633
申请日期
2007.10.17
申请人
MKS INTRUMENTS, INC.;SEIWERT, JOHANNES;BRAMMER, ULRICH;GOTTSCHALK, CHRISTIANE;LOHR, JOACHIM
发明人
SEIWERT, JOHANNES;BRAMMER, ULRICH;GOTTSCHALK, CHRISTIANE;LOHR, JOACHIM
