| 摘要 |
PURPOSE: A device for transferring a substrate is provided to prevent damage to a substrate by supporting the substrate using a shock-absorbing member, and to remarkably reduce an area required for installing the substrate. CONSTITUTION: A device(100) for transferring a substrate comprises a conveying chain(110), shock-absorbing members(116), an idle roller, a chain gear, and a drive part(114). Support members(110a) and link members(110b) are alternatively connected to the conveying chain. The conveying chain transfers a substrate. The shock-absorbing members are formed in the support members. The idle roller is arranged in one side of the substrate. The chain gear is coupled to the conveying chain, and transfers the substrate. The drive part is connected to the chain gear, and rotates the conveying chain.
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