发明名称 |
METHOD FOR MANUFACTURING FLEXIBLE SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: A manufacturing method of the flexible semiconductor device transfers film to the domain in which the peeling layer does not dissolve. The generation of the curve stress is prevented. CONSTITUTION: A peeling layer(101) is formed on the substrate(100). The semiconductor device is formed on the peeling layer. The resin layer(103) is formed on the semiconductor device. The peeling layer dissolves by using the etchant(104). The semiconductor device exfoliates from substrate. The resin layer comprises the UV curable acrylate. |
申请公布号 |
KR20100056983(A) |
申请公布日期 |
2010.05.28 |
申请号 |
KR20090112002 |
申请日期 |
2009.11.19 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
EGUCHI SHINGO;OIKAWA YOSHIAKI;KATAYAMA MASAHIRO;NAKAMURA AMI;MONMA YOHEI |
分类号 |
H01L29/786;G02F1/13;H05B33/02 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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