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发明名称
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heating Apparatus
摘要
申请公布号
KR100960019(B1)
申请公布日期
2010.05.28
申请号
KR20070123000
申请日期
2007.11.29
申请人
发明人
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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