| 摘要 |
PURPOSE: A probe card is provided to prevent the degradation of electrical reliability due to the increase of junction parts by directly connecting the connection part of an auxiliary PCB and the connection terminal of a main PCB with a connection cable. CONSTITUTION: A plurality of probes(100) is formed on the upper side of an auxiliary PCB(200). The probes contact to the contact pad of a semiconductor device formed on a wafer. A connection part(220) is formed on the upper side and the lower side of the auxiliary PCB. The connection part is connected to the probes. A main PCB(300) includes a plurality of wiring structures(310). One or more connection terminals(320) electrically connected to the wiring structures are formed on the one side of the main PCB. The main PCB is arranged under the auxiliary PCB. The connection terminals are formed on the lower side of the main PCB.
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