| 摘要 |
PURPOSE: A probe scrubber for a probe card is provided to improve removal efficiency of a foreign material attached to a probe by conveniently exchanging a pad member according to the change of the probe card type. CONSTITUTION: A cleaning unit(130) eliminates a foreign material. A lifting unit(120) shuttles the cleaning unit to the upward/downward direction. A circulating part(140) is located between the cleaning unit and the lifting unit and rotates the cleaning unit. The cleaning unit comprises the plate(131) of a rectangular shape, a pad member(132) attached to the upper and the lower side of the plate. The pad member with different materials is attached to both sides of the plate.
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