STAGE APPARATUS AND HOLDER, AND SCANNING EXPOSURE APPARATUS AND EXPOSURE APPARATUS,申请号KR20000077653-传众专利搜索

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发明名称	STAGE APPARATUS AND HOLDER, AND SCANNING EXPOSURE APPARATUS AND EXPOSURE APPARATUS
摘要
申请公布号	KR100945707(B1)	申请公布日期	2010.03.05
申请号	KR20000077653	申请日期	2000.12.18
申请人		发明人
分类号	G03F7/20;G02B1/12;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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