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发明名称
Methods for depositing metal films by CVD or ALD processes onto diffusion barrier layers
摘要
申请公布号
EP1916707(A3)
申请公布日期
2009.10.07
申请号
EP20080150390
申请日期
2004.04.30
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
GARG, DIWAKAR;CHENG, HANSONG;NORMAN, JOHN ANTHONY THOMAS;ORDEJON, PABLO
分类号
C23C16/18;H01L21/285;C23C14/58;H01L21/28;H01L21/3205;H01L21/768;H01L23/52
主分类号
C23C16/18
代理机构
代理人
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