| 摘要 |
PURPOSE: An alignment method, a tip position detecting device, and a probe apparatus are provided to alignment an electrode of a target and a plurality of probes by making a process of detecting the height of the plural probes simple. CONSTITUTION: An alignment method is comprised of the steps: detecting a tip position of a plurality of probe(12A) by using a position detecting unit; detecting the detected tip position of plural probes by using a second pick up unit(13B); Transferring deposition of the plural probe to a soft member by contacting the soft member and the plural probes; and detecting the deposition of the plural probes formed on the soft member by using a first pick up unit.
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