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发明名称
Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method
摘要
申请公布号
EP1501118(B1)
申请公布日期
2009.10.07
申请号
EP20040022766
申请日期
2000.03.15
申请人
JP
发明人
JP;JP;JP;JP
分类号
H01L21/205;C30B25/02;C30B25/18;C30B29/40;H01L21/20
主分类号
H01L21/205
代理机构
代理人
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地址
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