| 摘要 |
PURPOSE: A load-lock chamber is provided to transfer a wafer to a plurality of process chambers installed at various angles according to each process by setting an extension angle of a transfer arm freely. CONSTITUTION: A loadlock chamber(1) includes a main body(10), transfer arms(30) with a scalar structure, driving parts(20,20'). A plurality of gates for receiving and discharging a semiconductor material are installed in the main body. More than one transfer arm is installed inside the main body member, and a transfer arm transfers and processes the semiconductor material. More than one driving part is installed outside the main body member and operates the transfer arm. The driving part includes a rotation driving unit(21), a main axis, a first power transmission unit, a clutch part, and a second power transmission unit.
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