发明名称 |
A PROCESS FOR LARGE-SCALE PRODUCTION OF CDTE/CDS THIN FILM SOLAR CELLS |
摘要 |
<p>A process for large-scale production of CdTe/CdS thin film solar cells, films of the cells being deposited, in sequence, on a transparent substrate, the sequence comprising the steps of: depositing a film of a transparent conductive oxide (TCO) on the substrate; depositing a film of CdS on the TCO film; depositing a film of CdTe on the CdS film; treating the CdTe film with CdCl<SUB>2</SUB>; depositing a back-contact film on the treated CdTe film. Treatment of the CdTe film with CdCl<SUB>2 </SUB>comprises the steps of: forming a layer of CdCl<SUB>2 </SUB>on the CdTe film by evaporation, while maintaining the substrate at room temperature; annealing the CdCl<SUB>2 </SUB>layer in a vacuum chamber at a temperature generally within a range of 380° C. and 420° C. and a pressure generally within a range of 300 mbar and 1000 mbar in an inert gas atmosphere; removing the inert gas from the chamber so as to produce a vacuum condition, while the substrate is kept at a temperature generally within a range of 350° C. and 420° C. whereby any residual CdCl<SUB>2 </SUB>is evaporated from the CdTe film surface.</p> |
申请公布号 |
EP1433207(B8) |
申请公布日期 |
2009.10.07 |
申请号 |
EP20020785901 |
申请日期 |
2002.10.04 |
申请人 |
SOLAR SYSTEMS & EQUIPMENTS S.R.L. |
发明人 |
ROMEO, NICOLA;BOSIO, ALESSIO;ROMEO, ALESSANDRO |
分类号 |
H01L31/18;C23C14/06;C23C14/08;C23C14/58;H01L21/20;H01L21/363;H01L21/477;H01L31/0224;H01L31/04;H01L31/073 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|