| 摘要 |
<p>PURPOSE: An in-line apparatus is provided to prevent the stop of the apparatus when the preventive maintenance is performed in one chamber. CONSTITUTION: A loader chamber(100) unloads and loads a substrate. A plurality of process chambers(400,500,600,700) are connected in series to the loader chamber. At least one buffer chamber(550,650) is arranged in parallel to the process chambers and can move. The buffer chamber is connected in series to the remaining chamber instead of one process chamber among the plurality of process chambers. The buffer chamber provides a space for transferring the substrate.</p> |
