VPD CHAMBER AND DOOR ON/OFF APPARATUS FOR AUTO SCANNING SYSTEM

摘要

PURPOSE: A VPD unit of an auto scanning system and a door opening and closing device are provided to improve wafer yield by increasing the vapor phase decomposition effect of the wafer. CONSTITUTION: A VPD unit of an auto scanning system includes a body(100) and a door. The body is a rectangular cylinder and forms an internal space. A support is formed in the bottom of the body. Gas discharge and suction nozzles are positioned in the body. A transparent window(104) is formed in an upper side of the body. A detection terminal(105) for controlling the inner atmosphere is formed in the center of the body. A wafer slot(106) is formed by opening one side of the body. A door covers or opens the slot of the VPD unit.