<p>PURPOSE: A wafer loading apparatus is provided to improve reliability by preventing a foreign material between the wafer and an attachable holder. CONSTITUTION: A wafer loading apparatus includes a reciprocation driving unit(740), a transfer guide unit(750), and an attachable holder(760). The reciprocation driving unit generates the reciprocating driving power. The transfer guide unit is connected to the reciprocation driving unit and reciprocates. The attachable holder is mounted on the transfer guide unit and reciprocates with the transfer guide unit. The attachable holder holds the wafer on a wafer table(710) by attaching the wafer(10) loaded on a cassette(20). The attachable holder loads the wafer on the cassette.</p>
