| 摘要 |
PURPOSE: A device and a method for forming an alloy composite membrane are provided to massively produce alloy composite membranes by successively and continuously depositing palladium and metal. CONSTITUTION: A device for forming an alloy composite membrane is composed of a chamber(100), a stage(120), a palladium target(112), a metal target(114), and a rotating unit(130). One or more supporters(140) are loaded in the chamber. The stage is located in the bottom of the chamber, and has a supporter support(122) which fixes the supporters. The palladium target is located on the top of the stage, and supplies palladium deposited in the supporters. The metal target is located on the top of the stage, and supplies metal deposited in the supporters. The rotating unit is connected to the stage.
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