| 摘要 |
PURPOSE: A transfer robot is provided to easily separate a substrate from a hand by applying larger external power than adhesion to the substrate. CONSTITUTION: A transfer robot includes an arm(2), a hand, and an adhesion chuck(10). The hand is connected to the front side of the arm. A substrate is loaded on the upper side of the hand. The adhesive chuck is separated from the upper side of the hand and is fixedly installed. The adhesive chuck is adhered to the substrate and fixes the substrate.
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