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发明名称
MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, POSITION CONTROL METHOD AND POSITION CONTROL SYSTEM, AND DEVICE MANUFACTURING METHOD
摘要
申请公布号
EP2183645(A2)
申请公布日期
2010.05.12
申请号
EP20080791852
申请日期
2008.07.23
申请人
NIKON CORPORATION
发明人
SHIBAZAKI, YUICHI;KANAYA, YUHO
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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