发明名称 |
Optical measurement apparatus, spectroscopic ellipsometer, recording medium, and measurement method |
摘要 |
<p>An optical measurement apparatus includes: a storage processing part storing into a storage part a plurality of main reference positions where measurement is to be performed and at least one movement value relative to each main reference position; a main measuring part moving a measurement position to one of the main reference positions stored in the storage part, then irradiating light, and then measuring a change in a state of reflected light; an auxiliary measuring part moving the measurement position to an auxiliary reference position based on the movement value relative to one of the main reference positions stored in the storage part, then irradiating light, and then measuring a change in a state of reflected light; a main calculating part performing analysis and calculating a film thickness or an optical constant; and an auxiliary calculating part performing analysis and calculating a film thickness or an optical constant.</p> |
申请公布号 |
EP2184577(A1) |
申请公布日期 |
2010.05.12 |
申请号 |
EP20090175052 |
申请日期 |
2009.11.04 |
申请人 |
HORIBA, LTD. |
发明人 |
NABATOVA-GABAIN, NATALIYA;MINET, ERIC |
分类号 |
G01B11/06;G01N21/21 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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