Verfahren und Vorrichtung zur Bestimmung einer Winkelteilung

摘要

The method involves moving a sensor (3) e.g. scanning tunneling microscope (STM) or scanning force microscope (SFM), relative to an atomic lattice (2) on a circular path (6). Number and/or position of atoms (5) of the lattice is detected by the sensor. An angular spacing or an angle (W) is determined by the sensor, where the sensor is moved parallel to a lattice surface or a lattice plane or an axis relative to the lattice. Eccentricity and/or cyclic testing errors between a measuring bridge and a turntable are determined. An independent claim is also included for a device for measurement of an angular spacing or angle.