发明名称 Micro-extrusion system with airjet assisted bead deflection
摘要 A micro-extrusion system and a method for producing a plurality of beads of extrusion material on an upper surface of a target substrate is disclosed. The micro-extrusion system comprises an extrusion print-head assembly including an inlet port, a plurality of nozzle openings, and one or more flow channels, each of the one or more flow channels communicating between said inlet port and an associated one of said plurality of nozzle openings, a material feed system for supplying said extrusion material to said inlet port such that said extrusion material is forced through said one or more flow channels and exits through said plurality of nozzle openings, thereby producing said plurality of beads of extrusion material, means for supporting the extrusion print-head assembly and said target substrate, and for moving the extrusion print-head assembly relative to said target substrate such that extrusion material exiting said plurality of nozzle openings causes said plurality of beads to form parallel lines of extrusion material on the upper surface of the target substrate, and means for directing a gas against said plurality of beads such that said gas pushes said plurality of beads toward the target substrate.
申请公布号 EP2184767(A2) 申请公布日期 2010.05.12
申请号 EP20090173595 申请日期 2009.10.21
申请人 PALO ALTO RESEARCH CENTER INCORPORATED 发明人 FORK, DAVID K.;SOLBERG, SCOTT E.
分类号 H01L21/67;B29C47/12 主分类号 H01L21/67
代理机构 代理人
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