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发明名称
Koordinaten-Messmaschine und Verfahren zur Kalibrierung der Koordinaten-Messmaschine
摘要
申请公布号
DE102007030390(B4)
申请公布日期
2010.05.12
申请号
DE200710030390
申请日期
2007.06.29
申请人
VISTEC SEMICONDUCTOR SYSTEMS GMBH
发明人
FRICKE, WOLFGANG;RINN, KLAUS;CZERKAS, SLAWOMIR
分类号
G01B21/04;G01B11/03
主分类号
G01B21/04
代理机构
代理人
主权项
地址
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