发明名称 |
Smoothing tool for smoothing optical surfaces within spatial frequency range between one micrometer and two thousand micrometer, has polishing agent carrier made of synthetic, matting-type material |
摘要 |
<p>The smoothing tool (1) has a polishing agent carrier (3) made of a synthetic, matting-type material, and a nano-dispersed polishing agent (4) applied on a polishing agent carrier, where nano-dispersed polishing agent contains cerium oxide particle (5). An independent claim is included for a method for smoothing optical surfaces within a spatial frequency range between one micrometer and two thousand micrometer.</p> |
申请公布号 |
DE102008043600(A1) |
申请公布日期 |
2010.05.12 |
申请号 |
DE20081043600 |
申请日期 |
2008.11.10 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
STICKEL, FRANZ-JOSEF;LINDENBERGER, CLEMENS;HERTLE, JOERG |
分类号 |
B24B13/02;B24D13/12 |
主分类号 |
B24B13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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