发明名称 Smoothing tool for smoothing optical surfaces within spatial frequency range between one micrometer and two thousand micrometer, has polishing agent carrier made of synthetic, matting-type material
摘要 <p>The smoothing tool (1) has a polishing agent carrier (3) made of a synthetic, matting-type material, and a nano-dispersed polishing agent (4) applied on a polishing agent carrier, where nano-dispersed polishing agent contains cerium oxide particle (5). An independent claim is included for a method for smoothing optical surfaces within a spatial frequency range between one micrometer and two thousand micrometer.</p>
申请公布号 DE102008043600(A1) 申请公布日期 2010.05.12
申请号 DE20081043600 申请日期 2008.11.10
申请人 CARL ZEISS SMT AG 发明人 STICKEL, FRANZ-JOSEF;LINDENBERGER, CLEMENS;HERTLE, JOERG
分类号 B24B13/02;B24D13/12 主分类号 B24B13/02
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