发明名称 |
CONDUCTOR LAYER MANUFACTURING METHOD |
摘要 |
Provided is a method for manufacturing a titanium oxide conductor layer having excellent conductivity and transparency with high productivity. The conductor layer is manufactured by sequentially forming a first layer and a second layer, which are made of titanium oxide wherein a dopant such as Nb is added, on a substrate in a state where the substrate is heated. The first layer is formed under film forming conditions for forming a layer containing polycrystal which does not contain rutile type crystal. The second layer is formed under film forming conditions for obtaining a layer containing polycrystal which contains rutile type crystal when the layer is directly formed on the substrate.
|
申请公布号 |
KR20100049536(A) |
申请公布日期 |
2010.05.12 |
申请号 |
KR20107000653 |
申请日期 |
2008.08.27 |
申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
YAMADA NAOOMI;HITOSUGI TARO;HASEGAWA TETSUYA |
分类号 |
C23C14/08;G02F1/1343;H01B13/00 |
主分类号 |
C23C14/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|