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发明名称
HOCHFREQUENZ-PLASMASTRAHLQUELLE UND VERFAHREN ZUM BESTRAHLEN EINER OBERFLÄCHE
摘要
申请公布号
DE502004010974(D1)
申请公布日期
2010.05.12
申请号
DE200450010974T
申请日期
2004.04.08
申请人
LEYBOLD OPTICS GMBH
发明人
BECKMANN, RUDOLF
分类号
H01J37/32;H05H1/54
主分类号
H01J37/32
代理机构
代理人
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地址
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