| 摘要 |
<p>PURPOSE: A device for manufacturing a display device is provided to prevent moisture from condensing on a substrate by supplying a heated vent gas from the outside. CONSTITUTION: A chamber(100) for a vacuum-heat process is prepared. A hot plate(120) is arranged in the chamber. A plurality of external pipes(153) supplies a vent gas in order to convert the vacuum state of a chamber to an atmospheric pressure. A gas exhaust pipe(155) discharges the vent gas. A heating unit(151) is arranged on the external pipe and heats the vent gas. The vent gas is heated until the temperature of the vent gas is identical to the temperature in the chamber.</p> |
